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2019 Vol.30, Issue 4 Preview Page

Regular Paper

August 2019. pp. 146-153


G. S. May and S. M. Sze, “Photolithography” in Fundamentals of semiconductor fabrication, 6th Ed. (John Wiley & Sons, NY, 2003), Chapter 4.


M. H. Kim, “Design and analysis of compact exposure using UV LED,” Dankook University, Gyeonggi (2015), p. 4.


S. S. Bae, Y. W. Jung, Y. R. Kim, C. H. Song, J. Y. Song, and D. H. Kim, “Design of projection optics system for FPD exposure,” in Proc. KSPE Annual Meeting (KSPE, Korea, Oct. 2004), p. 2.


H. W. Jo, “The research of the optical focusing method using UVA LED array,” Korea Polytechnic University, Gyeonggi (2017), p. 4.


J. H. Seo, J. S. Lee, S. Y. Kim, Y. J. Jeong, H. J. Park, D. Y. Nam, and M. S. Jung, “Design of a bar-type TIR lens having a freeform surface for forming a line beam using an LED light source,” J. Opt. Soc. Korea 28, 295-303 (2017).


B. J. Kim, “Optimal design of LED lamp optics with a large area LED package for fulfilling a narrow beam angle,” Inha University, Incheon (2014), pp. 9-11.


D. K. Lee, “A study on development of an aspheric lens for the semiconductor laser applications,” Chonnam National University, Gwangju (2014), p. 3.

  • Publisher :Optical Society of Korea
  • Publisher(Ko) :한국광학회
  • Journal Title :Korean Journal of Optics and Photonics
  • Journal Title(Ko) :한국광학회지
  • Volume : 30
  • No :4
  • Pages :146-153
  • Received Date :2019. 05. 16
  • Revised Date :2019. 06. 03
  • Accepted Date : 2019. 06. 05