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2019 Vol.30, Issue 4 Preview Page

August 2019. pp. 146-153
Abstract


References
1 

G. S. May and S. M. Sze, “Photolithography” in Fundamentals of semiconductor fabrication, 6th Ed. (John Wiley & Sons, NY, 2003), Chapter 4.

2 

M. H. Kim, “Design and analysis of compact exposure using UV LED,” Dankook University, Gyeonggi (2015), p. 4.

3 

S. S. Bae, Y. W. Jung, Y. R. Kim, C. H. Song, J. Y. Song, and D. H. Kim, “Design of projection optics system for FPD exposure,” in Proc. KSPE Annual Meeting (KSPE, Korea, Oct. 2004), p. 2.

4 

H. W. Jo, “The research of the optical focusing method using UVA LED array,” Korea Polytechnic University, Gyeonggi (2017), p. 4.

5 

J. H. Seo, J. S. Lee, S. Y. Kim, Y. J. Jeong, H. J. Park, D. Y. Nam, and M. S. Jung, “Design of a bar-type TIR lens having a freeform surface for forming a line beam using an LED light source,” J. Opt. Soc. Korea 28, 295-303 (2017).

6 

B. J. Kim, “Optimal design of LED lamp optics with a large area LED package for fulfilling a narrow beam angle,” Inha University, Incheon (2014), pp. 9-11.

7 

D. K. Lee, “A study on development of an aspheric lens for the semiconductor laser applications,” Chonnam National University, Gwangju (2014), p. 3.

Information
  • Publisher :Optical Society of Korea
  • Publisher(Ko) :한국광학회
  • Journal Title :Korean Journal of Optics and Photonics
  • Journal Title(Ko) :한국광학회지
  • Volume : 30
  • No :4
  • Pages :146-153
  • Received Date :2019. 05. 16
  • Revised Date :2019. 06. 03
  • Accepted Date : 2019. 06. 05